Artículos de revistas
Structure and microstructure of PbTiO3 thin films obtained from hybrid chemical method
Fecha
2003-04-15Registro en:
Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. Lausanne: Elsevier B.V. Sa, v. 346, n. 1-2, p. 223-227, 2003.
0921-5093
10.1016/S0921-5093(02)00522-1
WOS:000180817700027
8507741729691974
6725982228402054
Autor
Universidade Estadual Paulista (Unesp)
Centro Brasileiro de Pesquisas Físicas (CBPF)
Institución
Resumen
PbTiO3 thin films were deposited on Si(100) via hybrid chemical method and crystallized between 400 and 700 degreesC to study the effect of the crystallization kinetics on structure and microstructure of these materials. X-ray diffraction (XRD) technique was used to study the structure of the crystallized films. In the temperature range investigated, the lattice strain (c/a) presented a maximum value (c/a = 1.056) for film crystallized at 600 degreesC for I h. Atomic force microscopy (AFM) was used in investigation of the microstructure of the films. The rms roughness of the films linearly increases with temperature and ranged from 1.25 to 9.04 nm while the grain sizes ranged from 130.6 to 213.6 nm. Greater grain size was observed for film crystallized at 600 degreesC for 1 h. (C) 2002 Elsevier B.V. S.A. All rights reserved.