dc.contributorUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-20T13:27:55Z
dc.date.available2014-05-20T13:27:55Z
dc.date.created2014-05-20T13:27:55Z
dc.date.issued2012-01-01
dc.identifier12th High-tech Plasma Processes Conference (htpp-12). Bristol: Iop Publishing Ltd, v. 406, p. 5, 2012.
dc.identifier1742-6588
dc.identifierhttp://hdl.handle.net/11449/9254
dc.identifier10.1088/1742-6596/406/1/012016
dc.identifierWOS:000314395400017
dc.identifierWOS000314395400017.pdf
dc.identifier9585258374949244
dc.identifier0406258050385008
dc.identifier0400554449253191
dc.identifier1946509801000450
dc.description.abstractThis paper deals with the study of the fragmentation process of diethylene glycol dimethyl ether (CH3O(CH2CH2O)(2)CH3) (diglyme here in) molecule in low pressure RF excited plasma discharges. The study was carried out using mass spectrometry. The results showed that for a fixed pressure, the increase of the RF power coupled to the plasma chamber from 1 to 35 W produced a plasma environment much more reactive which increases the population of the ionized species like CH3+ (15 amu), C2H4+ (28 amu), CH3O+ (31 amu), C2H4O+ (44 amu), CH3OCH2CH2+ (59 amu) and CH3OCH2CH2O+ (75 amu). This fact may be attributed to the increase of the electronic temperature that makes predominant the occurrence of inelastic processes that promotes molecular fragmentation. For a fixed value of RF power the increase of pressure from 50 mTorr to 100 mTorr produces the decreasing of the above mentioned chemical species due the lower electronic mean free path. These results suggest that if one wants to keep the monomer's functionality within the plasma deposited films resulting from such kind of discharges one must operate in low power conditions.
dc.languageeng
dc.publisherIop Publishing Ltd
dc.relation12th High-tech Plasma Processes Conference (htpp-12)
dc.relation0,241
dc.rightsAcesso aberto
dc.sourceWeb of Science
dc.titleStudy of RF-excited Diethylene Glycol Dimethyl Ether Plasmas by Mass Spectrometry
dc.typeActas de congresos


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