Humidity and pressure sensor based on internal reflection

Abstract

A low-cost humidity and pressure optical sensor, based on the internal reflection phenomenon, is presented. It takes advantage of the phase difference acquired by s- and p-polarized light undergoing internal reflection to generatean easily detectableminimumin the reflected profile, in a position corresponding to the critical angle. The apparatus presents good sensitivity to relative humidity changes above 70% and a response time below one second. The same device is also capable of measuring changes in pressure and can be used as a vacuum gauge between 1 and 1000 mbar.