The physicochemical processes at the surfaces of semiconductor nanostructures involved in electrochemical and sensing devices are strongly influenced by the presence of intrinsic or extrinsic defects. For revelation of the surface controlled sensing mechanism, intentional lattice oxygen defects are created on the surfaces of GaN nanowires for the elucidation of charge transfer process in methane (CH4) sensing. Experimental and simulation results of electron energy loss spectroscopy (EELS) studies on oxygen rich GaN nanowires confirmed the possible presence of 2(O-N) and V-Ga-3O(N) defect complexes. A global resistive response for sensor devices of ensemble nanowires and a localized charge transfer process in single GaN nanowires are studied by in situ scanning Kelvin probe microscopy (SKPM). A localized charge transfer process, involving the V-Ga-3O(N) defect complex on a nanowire surface, is attributed to controlling the global gas sensing behavior of the oxygen rich ensemble GaN nanowires.11936 2125121260Department of Atomic Energy, India