The Effect of Boron Doping Level on The Morphology and Structure of Ultra/Nanocrystalline Diamond Films

dc.creatorSouza, FA
dc.creatorAzevedo, AF
dc.creatorGiles, C
dc.creatorSaito, E
dc.creatorBaldan, MR
dc.creatorFerreira, NG
dc.date2012
dc.dateJUN
dc.date2014-07-31T13:58:23Z
dc.date2015-11-26T17:53:11Z
dc.date2014-07-31T13:58:23Z
dc.date2015-11-26T17:53:11Z
dc.date.accessioned2018-03-29T00:36:45Z
dc.date.available2018-03-29T00:36:45Z
dc.identifierChemical Vapor Deposition. Wiley-v C H Verlag Gmbh, v. 18, n. 41794, n. 159, n. 165, 2012.
dc.identifier0948-1907
dc.identifierWOS:000304861000014
dc.identifier10.1002/cvde.201106953
dc.identifierhttp://www.repositorio.unicamp.br/jspui/handle/REPOSIP/75017
dc.identifierhttp://repositorio.unicamp.br/jspui/handle/REPOSIP/75017
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/1290459
dc.descriptionFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
dc.descriptionCoordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
dc.descriptionConselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)
dc.descriptionIn this work, boron-doped nanocrystalline diamond (BDND) films are grown on silicon substrates by hot-filament (HF)CVD in Ar/H2/CH4 gas mixtures. In this study, the transition from ultra-nanocrystalline to nanocrystalline diamond films is clearly shown by the addition of boron dopant to the growth of the gas mixture. The doping process consists of an additional H2 line passing through a bubbler containing B2O3 dissolved in methanol with various B/C ratios. Five sample sets are obtained with doping in the methanol bubbler solution of 2?000, 5?000, 10?000, 20?000, and 30?000?ppm for a 16?h growth time. The morphology, roughness, and structure of these films have markedly different properties. The cross-section of the films is characterized by scanning electron microscopy (SEM) showing the transition from ultra-nanocrystalline growth (renucleation process) to a columnar structure of nanocrystalline films. The acceptor density values, evaluated by Raman spectra and by Mott-Schottky plot analysis, vary from 1020 to 1021 B cm-3 as the doping level increases. The grain size and the relative intensity of the (111)/(220) peaks are obtained from X-ray diffraction (XRD) patterns of the films. The diamond average grain size increases from 10 to 35?nm for films with 2?000 and 30?000?ppm B/C, respectively, in the methanol bubbler solution. The preferential orientation also changes, from (220) to (111), as the boron doping level increases.
dc.description18
dc.description41794
dc.description159
dc.description165
dc.descriptionFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
dc.descriptionCoordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
dc.descriptionConselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)
dc.descriptionFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
dc.descriptionCoordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
dc.descriptionConselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)
dc.languageen
dc.publisherWiley-v C H Verlag Gmbh
dc.publisherWeinheim
dc.publisherAlemanha
dc.relationChemical Vapor Deposition
dc.relationChem. Vapor Depos.
dc.rightsfechado
dc.rightshttp://olabout.wiley.com/WileyCDA/Section/id-406071.html
dc.sourceWeb of Science
dc.subjectAFM
dc.subjectDoped diamond films
dc.subjectMott-Schottky
dc.subjectNanocrystalline
dc.subjectUltra-nanocrystalline
dc.subjectXRD
dc.subjectX-ray-diffraction
dc.subjectNanocrystalline Diamond
dc.subjectUltrananocrystalline Diamond
dc.subjectRaman-spectroscopy
dc.subjectHot-filament
dc.subjectDoped Diamond
dc.subjectThin-films
dc.subjectGrowth
dc.subjectCvd
dc.subjectNanodiamond
dc.titleThe Effect of Boron Doping Level on The Morphology and Structure of Ultra/Nanocrystalline Diamond Films
dc.typeArtículos de revistas


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