We use the interference of two pulsed laser beams (wavelength=355 nm) to produce an optical diffraction grating in amorphous germanium-nitrogen alloy (a-GeN). At the constructive maxima of the interference pattern, the absorption of light leads to crystallization. The crystallized region results of pure microcrystalline germanium (muc-Ge). An indication that Ge-N bonds have broken and nitrogen outdiffused of the film is obtained from infrared spectroscopy and confirmed by Raman spectra. A pattern of alternating a-GeN and muc-Ge lines with a period of about 4 mum acts as an optical diffraction grating due to the difference in optical properties between the two materials, and the three dimensional surface profile, caused by N-2 effusion, that is formed on the sample. (C) 2002 American Institute of Physics.811527312733