Influence of hydrogen on the thermomechanical properties of a-CNx : H and a-CNx films deposited by glow discharge and ion beam assisted deposition

dc.creatorChampi, A
dc.creatorBarbieri, PF
dc.creatorMarques, FC
dc.date2006
dc.date37073
dc.date2014-11-15T10:02:25Z
dc.date2015-11-26T17:19:24Z
dc.date2014-11-15T10:02:25Z
dc.date2015-11-26T17:19:24Z
dc.date.accessioned2018-03-29T00:07:05Z
dc.date.available2018-03-29T00:07:05Z
dc.identifierJournal Of Non-crystalline Solids. Elsevier Science Bv, v. 352, n. 21-22, n. 2264, n. 2266, 2006.
dc.identifier0022-3093
dc.identifierWOS:000238799800031
dc.identifier10.1016/j.jnoncrysol.2006.02.005
dc.identifierhttp://www.repositorio.unicamp.br/jspui/handle/REPOSIP/80180
dc.identifierhttp://www.repositorio.unicamp.br/handle/REPOSIP/80180
dc.identifierhttp://repositorio.unicamp.br/jspui/handle/REPOSIP/80180
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/1282897
dc.descriptionThe coefficient of thermal expansion (CTE), Young's modulus, Poisson's ratio, stress and hardness of a-CNx and a-CNx:H were investigated as a function of nitrogen concentration. Hydrogenated films were prepared by glow discharge, GD, and unhydrogenated films were prepared by ion beam assisted deposition, IBAD. Using nanohardness measurements and the thermally induced bending technique, it was possible to extract separately, Young's modulus and Poisson's ratio. A strong influence of hydrogen, in a-CNx:H films, was observed on the CTE, which reaches about similar to 9 x 10(-6) C-1, close to that of graphite (similar to 8 x 10(-6) C-1) for nitrogen concentration as low as 5 at.%. On the other hand, the CTE of unhydrogenated films increases with nitrogen concentration. at a much lower rate, reaching 5.5 x 10(-6) C-1 for 33 at.% nitrogen. (c) 2006 Elsevier B.V. All rights reserved.
dc.description352
dc.description21-22
dc.description2264
dc.description2266
dc.languageen
dc.publisherElsevier Science Bv
dc.publisherAmsterdam
dc.publisherHolanda
dc.relationJournal Of Non-crystalline Solids
dc.relationJ. Non-Cryst. Solids
dc.rightsfechado
dc.rightshttp://www.elsevier.com/about/open-access/open-access-policies/article-posting-policy
dc.sourceWeb of Science
dc.subjectcarbon
dc.subjectmechanical properties
dc.subjectCarbon Nitride Films
dc.subjectAmorphous-carbon
dc.subjectThermal-expansion
dc.subjectThin-films
dc.subjectCoefficient
dc.titleInfluence of hydrogen on the thermomechanical properties of a-CNx : H and a-CNx films deposited by glow discharge and ion beam assisted deposition
dc.typeArtículos de revistas


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