Artículos de revistas
Observation of the Berreman effect in infrared reflection-absorption spectra of amorphous titanium oxide thin films deposited on aluminum
Registro en:
Applied Spectroscopy. Soc Applied Spectroscopy, v. 54, n. 5, n. 687, n. 691, 2000.
0003-7028
WOS:000087578100012
10.1366/0003702001949933
Autor
Trasferetti, BC
Davanzo, CU
Da Cruz, NC
De Moraes, MAB
Institución
Resumen
Infrared reflection-absorption spectra of plasma-enhanced chemical vapor deposition (PECVD) amorphous TiO2 thin films on aluminum were obtained with s- and p-polarized light and oblique incidence angles. such spectra were analyzed by means of spectral simulations based on a Fresnel equation for a three-layered system. The optical constants used in the simulations were obtained through the Kramers-Kronig analysis of the reflectance spectra of a pellet of powdered amorphous TiO2. LO-TO energy-loss functions were also calculated from these optical constants, and a splitting was observed. A good qualitative agreement between experimental and simulated spectra was achieved, and the Berreman effect was observed in both cases when p-polarized light was used, It was shown, therefore, that the Berreman effect makes infrared reflection-absorption spectroscopy a successful technique for the characterization of an amorphous TiO2 thin layer on aluminum. 54 5 687 691