Oxygen etching mechanism in carbon-nitrogen (CNx) domelike nanostructures

dc.creatorAcuna, JJS
dc.creatorFigueroa, CA
dc.creatorBiggemann, D
dc.creatorKleinke, MU
dc.creatorAlvarez, F
dc.date2008
dc.date42156
dc.date2014-11-19T04:59:49Z
dc.date2015-11-26T17:02:23Z
dc.date2014-11-19T04:59:49Z
dc.date2015-11-26T17:02:23Z
dc.date.accessioned2018-03-28T23:50:27Z
dc.date.available2018-03-28T23:50:27Z
dc.identifierJournal Of Applied Physics. Amer Inst Physics, v. 103, n. 12, 2008.
dc.identifier0021-8979
dc.identifierWOS:000257284100126
dc.identifier10.1063/1.2948941
dc.identifierhttp://www.repositorio.unicamp.br/jspui/handle/REPOSIP/58956
dc.identifierhttp://www.repositorio.unicamp.br/handle/REPOSIP/58956
dc.identifierhttp://repositorio.unicamp.br/jspui/handle/REPOSIP/58956
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/1278905
dc.descriptionWe report a comprehensive study involving the ion beam oxygen etching purification mechanism of domelike carbon nanostructures containing nitrogen. The CNx nanodomes were prepared on Si substrate containing nanometric nickel islands catalyzed by ion beam sputtering of a carbon target and assisting the deposition by a second nitrogen ion gun. After preparation, the samples were irradiated in situ by a low energy ion beam oxygen source and its effects on the nanostructures were studied by x-ray photoelectron spectroscopy in an attached ultrahigh vacuum chamber, i.e., without atmospheric contamination. The influence of the etching process on the morphology of the samples and structures was studied by atomic force microscopy and field emission gun-secondary electron microscopy, respectively. Also, the nanodomes were observed by high resolution transmission electron microscopy. The oxygen atoms preferentially bond to carbon atoms by forming terminal carbonyl groups in the most reactive parts of the nanostructures. After the irradiation, the remaining nanostructures are grouped around two well-defined size distributions. Subsequent annealing eliminates volatile oxygen compounds retained at the surface. The oxygen ions mainly react with nitrogen atoms located in pyridinelike structures. (C) 2008 American Institute of Physics.
dc.description103
dc.description12
dc.languageen
dc.publisherAmer Inst Physics
dc.publisherMelville
dc.publisherEUA
dc.relationJournal Of Applied Physics
dc.relationJ. Appl. Phys.
dc.rightsaberto
dc.sourceWeb of Science
dc.subjectBeam-assisted Deposition
dc.subjectField-emission
dc.subjectPhotoelectron-spectroscopy
dc.subjectBonding Structure
dc.subjectAmorphous-carbon
dc.subjectNanotubes
dc.subjectNitride
dc.subjectFilms
dc.subjectOxidation
dc.subjectHydrogen
dc.titleOxygen etching mechanism in carbon-nitrogen (CNx) domelike nanostructures
dc.typeArtículos de revistas


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