PECVD of amorphous hydrogenated oxygenated nitrogenated carbon films

dc.creatorDurrant, SF
dc.creatorDe Moraes, MAB
dc.date1998
dc.dateAUG
dc.date2014-12-02T16:31:03Z
dc.date2015-11-26T16:45:48Z
dc.date2014-12-02T16:31:03Z
dc.date2015-11-26T16:45:48Z
dc.date.accessioned2018-03-28T23:31:27Z
dc.date.available2018-03-28T23:31:27Z
dc.identifierJournal Of Polymer Science Part B-polymer Physics. John Wiley & Sons Inc, v. 36, n. 11, n. 1881, n. 1888, 1998.
dc.identifier0887-6266
dc.identifierWOS:000074604600009
dc.identifier10.1002/(SICI)1099-0488(199808)36:11<1881
dc.identifierhttp://www.repositorio.unicamp.br/jspui/handle/REPOSIP/59192
dc.identifierhttp://www.repositorio.unicamp.br/handle/REPOSIP/59192
dc.identifierhttp://repositorio.unicamp.br/jspui/handle/REPOSIP/59192
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/1274329
dc.descriptionAn actinometric optical emission spectroscopy (AOES) study of the trends in the concentrations of the plasma species H, CH, CO, OH, and CN in film-producing glow discharges of mixtures of isopropanol and nitrogen was undertaken. Conventional AOES was used to obtain the trends in the plasma concentrations of these species as a function of the proportion of nitrogen in the feed, R-n. A dynamic variant of actinometry in which trends in the concentrations of plasma species are measured as a function of time following the cutting of one of the principal gas flows was also employed to investigate the relative importance of gas phase and plasma/polymer-surface interactions in the production of the species of interest. Each of the above-mentioned species is produced, to some degree, by plasma/polymer-surface reactions. As revealed by transmission infrared spectroscopy, the films deposited contain C-H, C=O, and O-H groups. For R-n > 0, the films become nitrogenated, with both N-H and C=N groups being present. As revealed by transmission ultraviolet-visible spectroscopy, both the optical gap and the refractive index of the deposited films decrease as R-n is increased. (C) 1998 John Wiley & Sons, Inc.
dc.description36
dc.description11
dc.description1881
dc.description1888
dc.languageen
dc.publisherJohn Wiley & Sons Inc
dc.publisherNew York
dc.publisherEUA
dc.relationJournal Of Polymer Science Part B-polymer Physics
dc.relationJ. Polym. Sci. Pt. B-Polym. Phys.
dc.rightsfechado
dc.rightshttp://olabout.wiley.com/WileyCDA/Section/id-406071.html
dc.sourceWeb of Science
dc.subjectactinometric optical emission spectrometry
dc.subjectplasma/surface interactions
dc.subjectnitrogenated plasma polymers
dc.subjectEmission-spectroscopy
dc.subjectOptical-emission
dc.subjectRf Discharges
dc.subjectThin-films
dc.subjectMixtures
dc.subjectDeposition
dc.subjectMechanisms
dc.subjectPlasmas
dc.subjectDensity
dc.titlePECVD of amorphous hydrogenated oxygenated nitrogenated carbon films
dc.typeArtículos de revistas


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