Artículos de revistas
Fabrication of dielectric hollow submicrometric pipes
Registro en:
Journal Of Vacuum Science & Technology B. Amer Inst Physics, v. 18, n. 2, n. 713, n. 716, 2000.
1071-1023
WOS:000086587000020
10.1116/1.591264
Autor
Soares, LL
Cescato, L
Cruz, NC
de Moraes, MB
Institución
Resumen
A simple technique to obtain an array of hollow submicrometric titanium oxide pipes is described. Initially, a submicrometric structure is formed in a positive photoresist by holographic exposure, followed by the deposition of the titanium oxide film and the removal of the photoresist by an appropriate solvent. These structures may be useful as waveguides for x-ray and neutron capillary optics. (C) 2000 American Vacuum Society. [S0734-211X(00)02202-2]. 18 2 713 716