Simulation results for Ga ion beam interaction with thin membranes of different materials (C, Si, Pt) are presented. Experiments with ion beam irradiation were carried out at different doses with suspended 50-100 nm thick multi-layer graphene (MLG) flakes. Cross-sectioning using focused ion beam milling revealed that material removal occurs in areas 60-80 nm wide at the beam lateral dimension of 20 nm, being consistent with the results of TRIM simulations. Further studies with thinner MLG samples are in progress to achieve better ion beam processing resolution. © 2013 Nova Science Publishers, Inc. All rights reserved. 8591Gierak, J., Madouri, A., Biance, A.L., Bourhis, E., Patriarche, G., Ulysse, C., Lucot, D., (2007) Microelectron. Eng., 84, pp. 779-783Tripathi, S.K., Shukla, N., Rajput, N.S., Kulkarni, V.N., (2009) Nanotechnology, 20, p. 275301Vaz, A.R., da Silva, M.M., Leon, J., Moshkalev, S.A., Swart, J.W., (2008) J. Mater. Sci., 43, pp. 3429-3434Moshkalev, S.A., Leon, J., Veríssimo, C., Vaz, A.R., Flacker, A., de Moraes, M.B., Swart, J.W., (2008) J. Nano Research, 3, p. 25Rouxinol, F.P., Gelamo, R.V., Amici, R.G.., Vaz, A.R., Moshkalev, S.A., (2010) Appl. Phys. Lett., 97, p. 253104Gierak, J., Bourhis, E., Faini, G., Patriarche, G., Madouri, A., Schiedt, B., Biance, A.-L., Auvray, L., (2009) Ultramicroscopy, 109, p. 457Böttcher, A., Heil, M., Stürzl, N., Jester, S.S., Malik, S., Pérez-Willard, F., Brenner, P., Kappes, M.M., (2006) Nanotechnology, 17, p. 5889Ziegler, J.F., TRIM/SRIM-The Stopping and Range of Ions in Matter http://www.srim.org, Available at