Actas de congresos
Structural And Electrical Properties Of Ge Nanoparticles Grown By Lpcvd For Mosstructures
Registro en:
9781479905188
Chip In Curitiba 2013 - Sbmicro 2013: 28th Symposium On Microelectronics Technology And Devices. Ieee Computer Society, v. , n. , p. - , 2013.
10.1109/SBMicro.2013.6676157
2-s2.0-84893491294
Autor
Mederos M.
Mestanza S.N.M.
Doi I.
Diniz J.A.
Institución
Resumen
Silicon dioxide (SiO2) on Si layer with embedded Germanium (Ge) nanoparticles (nps) were made by Low Pressure Chemical Vapor Deposition (LPCVD). Atomic Force Microscopy (AFM) and Raman spectroscopy has been used to study the Ge distribution on SiO2 films as a function of the different temperatures of growth employed. Layers of Ge-nps at 12 nm-near to the Si/SiO2 interface were formed, where the best result was reposted for the sample grown at 650°C with a density of 7.8×1010 cm-2 and a mean radius of 37 nm. Capacitive-Voltage measurements were performed on metal-oxide-semiconductor structures containing these Ge nps in order to study their electrical properties. The results indicate the existence of memory effect at relative low programming voltage (<6V) due to the presence of Ge-nps near the Si/SiO2 interface. © 2013 IEEE.
ACM SIGDA,IEEE,IEEE Circuits and Systems Society (CAS),SBU,Sociedade Brasileira de Computacao (SBC) Horvath, Z.J., Basa, P., (2009) Materials Scienece Forum, 609, p. 1 Tiwari, S., Rana, F., Hanafi, H., Harstein, A., Crabbe, E.F., Chan, K., (1996) Appl. Phys. Lett, 68, p. 1377 Kim, J.K., Cheong, H.J., Kim, Y., Yi, Y.J., Bark, H.J., Bang, S.H., Cho, J.H., (2003) App!. Phys. Lett, 82, p. 2527 Das, K., Nandagoswami, M., Mahapatra, R., Kar, G.S., Dhar, A., Acharya, H.N., Maikap, S., Ray, S.K., (2004) App!. Phys. Lett, 84, p. 1386 King, Y.C., King, T.J., Hu, C., (2001) IEEE Trans. Electron Devices, 48, p. 696 Kanoun, M., Souifi, A., Baron, T., Mazen, F., (2004) Appl. Phys. Lett, 84, p. 5079 Duguay, S., Burignat, S., Kern, P., Grob, J.J., Soudi, A., Slaoui, A., (2007) Semicond. Sci. Techno, 22, p. 837 Yang, M., Chen, T.P., Wong, J.I., Liu, Y., Ding, L., Liu, K.Y., Zhang, S., Ng, C.Y., (2009) J. Phys. D: App Phys, 42, p. 035109 Werwa, E., Seraphin, A.A., Chiu, L.A., Zhou, C.X., Kolenbrander, K.D., (1994) Appl. Phys. Lett, 64, p. 1821 Kanoun, M., Busseret, C., Poncet, A., Souifi, A., Baron, T., Gautier, E., (2006) Solid-State Electronic, 50, p. 1310 Duguay, S., Grob, J.J., Slaoui, A., Le Gall, Y., Amann-Liess, M., (2005) J. App!. Phys, 97, p. 104330