Actas de congresos
Plasma Diagnostics In An Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell
Registro en:
9781566776462
Ecs Transactions. , v. 14, n. 1, p. 365 - 373, 2008.
19385862
10.1149/1.2956051
2-s2.0-57749188034
Autor
Daltrini A.M.
Moshkalev S.A.
Morgan T.J.
Piejak R.B.
Graham W.G.
Institución
Resumen
An Inductively Coupled Plasma - Gaseous Electronics Conference reference cell was studied by different diagnostics: laser induced fluorescence, Langmuir probe, optical emission spectroscopy (Ar line ratios) and coil electrical measurements. Two modes of operation (high and low density plasma) were analyzed. A hysteresis in the transition between modes is identified only when the applied power is considered. When the plasma power is considered (coil losses are subtracted), the plasma parameters showed a smooth behavior between the two modes. The comparison of the plasma parameters obtained by different diagnostics showed a good agreement, revealing differences in the electron energy distribution function and the usefulness of Ar line ratio method. © The Electrochemical Society. 14 1 365 373 Campbell, S.A., (2001) The Science and Engineering of Microelectronic Fabrication, , Oxford University Press, New York Daltrini, A.M., Moshkalev, S.A., Monteiro, M.J.R., Besseler, E., Kostryukov, A., Machida, M., (2007) J. Appl. Phys, 101, p. 073309 Cunge, G., Crowley, B., Vender, D., Turner, M.M., (1999) Plasma Sources Sci. Technol, 8, p. 576 Czerwiec, T., Graves, D.B., (2004) J. Phys. D: Appl. Phys, 37, p. 2827 Ostrikov, K.N., Xu, S., (2000) J. Appl. Phys, 88, p. 2268 Daltrini, A.M., Moshkalev, S.A., Morgan, T.J., Piejak, R.B., Graham, W.G., (2008) Appl. Phys. Lett, 92, p. 061504 McMillin, B.K., Zachariah, M.R., (1995) J. Appl. Phys, 77, p. 5538 Boffard, J.B., Lin, C.C., DeJoseph Jr, C.A., (2004) J. Phys. D: Appl. Phys, 37, pp. R143 Corr, C.S., (2003), PhD thesis, The School of Maths and Physics, Faculty of Science and Agriculture, Queen's University of BelfastHopkins, M.B., Graham, W.G., (1986) Rev. Sci. Instrum, 57, p. 2210