Plasma Parameters Obtained With Planar Probe And Optical Emission Spectroscopy

dc.creatorDaltrini A.M.
dc.creatorMoshkalev S.A.
dc.creatorSwart L.
dc.creatorVerdonck P.B.
dc.date2007
dc.date2015-06-30T18:52:52Z
dc.date2015-11-26T14:39:18Z
dc.date2015-06-30T18:52:52Z
dc.date2015-11-26T14:39:18Z
dc.date.accessioned2018-03-28T21:44:53Z
dc.date.available2018-03-28T21:44:53Z
dc.identifier
dc.identifierJournal Of Integrated Circuits And Systems. , v. 2, n. 2, p. 67 - 73, 2007.
dc.identifier18071953
dc.identifier
dc.identifierhttp://www.scopus.com/inward/record.url?eid=2-s2.0-50049091242&partnerID=40&md5=52a7439e6bb09983f909ce458c6b95f6
dc.identifierhttp://www.repositorio.unicamp.br/handle/REPOSIP/105219
dc.identifierhttp://repositorio.unicamp.br/jspui/handle/REPOSIP/105219
dc.identifier2-s2.0-50049091242
dc.identifier.urihttp://repositorioslatinoamericanos.uchile.cl/handle/2250/1249941
dc.descriptionA planar probe and optical emission spectroscopy were employed to analyze parameters in an inductively coupled plasma (ICP).The analyses were performed in Ar, Ar+SF6 and O2 plasmas at 40 mTorr. Typical probe results indicate an ion current of 10-3 A/cm2 and an electron temperature (high energy tail) between 1-2 eV in measurements at high powers. At low powers a distinct discharge regime is observed, typically with low density (low ion current) and high electron temperature. The optical emission studies also showed the presence of these two regimes. Moreover, The electron temperature determination using this diagnostic is also in good agreement with planar probe results.
dc.description2
dc.description2
dc.description67
dc.description73
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dc.languageen
dc.publisher
dc.relationJournal of Integrated Circuits and Systems
dc.rightsfechado
dc.sourceScopus
dc.titlePlasma Parameters Obtained With Planar Probe And Optical Emission Spectroscopy
dc.typeActas de congresos


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