Actas de congresos
Comparison Of Plasma Parameters Obtained With Planar Probe And Optical Spectrometer
Registro en:
1566775124; 9781566775120
Ecs Transactions. , v. 4, n. 1, p. 515 - 524, 2006.
19385862
2-s2.0-33847632422
Autor
Swart L.
Daltrini A.M.
Moshkalyov S.A.
Verdonck P.
Institución
Resumen
A planar probe and an optical spectrometer were employed to analyze some parameters in an inductively coupled plasma (ICP). The analyses were performed in Ar, Ar+SF6 and O2 plasmas at 40 mTorr. Typical probe results indicate an ion current of 10-3 A/cm2 and an electron temperature (high energy tail) between 1-2 eV in measurements at high powers. At low powers a distinct discharge regime is observed, typically with low density (low ion current) and high electron temperature. Even though a quantitative analysis has not been done yet, the optical emission studies also showed the presence of these two regimes. © 2006 The Electrochemical Society. 4 1 515 524 Chen, F.F., (1965) Plasma Diagnostic Techniques, , R. H. Huddlestone and S. L. Leonard, Editors, Academic Press, New York Sudit, I.D., Chen, F.F., (1994) Plasma Sources Sci. Technol, 3, p. 162 Laframboise, J.G., Univ, Toronto Inst (1966) Aerospace Studies Rept, 100 Braithwaite, N.S.J., Booth, J.P., Cunge, G., (1996) Plasma Sources Science and Technology, 5, p. 677 Boffard, J.B., Lin, C.C., DeJoseph Jr, C.A., (2004) J. Phys. D: Appl. Phys, 37, pp. R143 Francis, A., (1997) Appl. Phys. Lett, 71, p. 3796 Czerwiec, T., Graves, D.B., (2004) J. Phys. D: Appl. Phys, 37, p. 2827 Lieberman, M.A., Lichtenberg, A.J., (1994) Principles of Plasma Discharges and Materials Processing, , New York, Wiley Chapman, B., (1980) Glow Discharge Processes, , John Wiley and Sons L. Swart and P. Verdonck, in Microelectronics Technology and Devices SBMicro2005, C. Claeys, J. W. Swart, N. I. Morimoto and P. Verdonck, Editors, PV 05-8, p. 254, The Electrochemical Society Proceedings Series, Pennington, NJ (2005)