Artículos de revistas
Micro-crystalline Diamond And Nano-carbon Structures Produced Using A High Argon Concentration In Hot-filament Chemical Vapor Deposition
Registro en:
Journal Of Vacuum Science And Technology, Part A: Vacuum, Surfaces And Films. , v. 19, n. 4, p. 1057 - 1062, 2001.
7342101
10.1116/1.1366701
2-s2.0-0035391965
Autor
Baranauskas V.
Peterlevitz A.C.
Ceragioli H.J.
Durrant S.F.
Institución
Resumen
The carbon structures and micro-crystalline diamond produced using argon in high concentrations in a hot-filament chemical vapor deposition (CVD) reactor fed with a mixture of ethanol and hydrogen were studied. Well faceted diamond films with vertical flaws, layered structures with diamond-like carbon (DLC) balls and spongy structures of carbon wires were obtained using the method. Argon was found to minimize the growth rate of hydrogenated materials formed in the intergranular spaces of columnar CVD diamond films and at the interstitial sites of deposited carbon-nuclei structures. Modified kinetics of the carbon deposition process, increase in number of flaws between the diamond grains and increased porosity was observed due to the action of argon. 19 4 1057 1062 Angus, J.C., Hayman, C.C., (1988) Science, 241, p. 913 Yarborough, W.A., Messier, R., (1990) Science, 241, p. 688 Derjaguin, B.V., Fedoseev, D., (1977) Izd., , Nauka, Moscow, Chap. 4 Zhu, W., Inspektor, A., Badzian, A.R., McKenna, T., Messier, R., (1990) J. Appl. Phys., 68, p. 1489 Shih, H.C., Sung, C.P., Fan, W.L., (1992) Surf. Coat. Technol., 54-55, p. 380 Matsumoto, O., Toshima, H., Kanzaki, Y., (1985) Thin Solid Films, 128, p. 341 Matsumoto, O., Katagiri, T., (1987) Thin Solid Films, 146, p. 283 Baranauskas, V., Ceragioli, H.J., Peterlevitz, A.C., Tosin, M.C., Durrant, S.F., (2000) Thin Solid Films, 377-378, p. 303 Baranauskas, V., Peled, A., Trava-Airoldi, V.J., Lima, C.A.S., Doi, I., Corat, E.J., (1994) Appl. Surf. Sci., 79-80, p. 129 Barros, R.C.M., Corat, E.J., Ferreira, N.G., Souza, T.M., Trava-Airoldi, V.J., Leite, N.F., Iha, K., (1996) Diamond Relat. Mater., 5, p. 1323 Condon, E.U., Odishaw, H., (1967) Handbook of Physics, , McGraw-Hill, New York, Chap. 5, Table 5.1 Thareja, R.K., Dwivedi, R.K., Abbilasha, (1997) Phys. Rev. B, 55, p. 2600 Nemanich, R.J., Solin, S.A., (1979) Phys. Rev. B, 20, p. 392 Yoshikawa, M., Katagiri, G., Ishida, H., Ishitani, A., Ono, M., Matsumura, K., (1989) Appl. Phys. Lett., 55, p. 2608 Obraztsova, E.D., Fujii, M., Hayashi, S., Kuznetsov, V.L., Butenko, Yu.V., Chuvlinin, A.L., (1998) Carbon, 36, p. 821 Li, W., Zhang, H., Wang, C., Zhang, Y., Xy, L., Zhu, K., Xie, S., (1997) Appl. Phys. Lett., 70, p. 2684 Zhao, X., Ando, Y., (1998) Jpn. J. Appl. Phys., Part 1, 37, p. 4846 Lander, J.J., Morrison, J., (1964) Surf. Sci., 2, p. 241 Baranauskas, V., Ceragioli, H.J., Peterlevitz, A.C., Tosin, M.C., Durrant, S.F., (2000) Thin Solid Films, 377-388, p. 182 Baranauskas, V., Ceragioli, H.J., Peterlevitz, A.C., Durrant, S.F., Diamond Relat. Mater., , accepted Thornton, J.A., (1974) J. Vac. Sci. Technol., 11, p. 666 Beale, H.A., Grossklaus, W., (1977) Thin Solid Films, 12, p. 281 Thornton, J.A., (1977) Annu. Rev. Mater. Sci., 7, p. 239 Shaldervan, A.I., Nakhodin, N.G., (1971) Sov. Phys. Solid State, 12, p. 1748 Thornton, J.A., Hedgcoth, V.L., (1975) J. Vac. Sci. Technol., 12, p. 93 Holman, W.R., Huegel, F.J., (1974) J. Vac. Sci. Technol., 11, p. 701 Feist, W.M., Steele, S.R., Readey, D.W., (1969) Physics of Thin Films, 5, p. 237. , edited by G. Hass (Academic, New York)