dc.creator | Zoccal L.B. | |
dc.creator | Diniz J.A. | |
dc.creator | Ramos A.C.S. | |
dc.date | 2005 | |
dc.date | 2015-06-26T14:10:23Z | |
dc.date | 2015-11-26T14:10:36Z | |
dc.date | 2015-06-26T14:10:23Z | |
dc.date | 2015-11-26T14:10:36Z | |
dc.date.accessioned | 2018-03-28T21:11:21Z | |
dc.date.available | 2018-03-28T21:11:21Z | |
dc.identifier | | |
dc.identifier | Proceedings - Electrochemical Society. , v. PV 2005-08, n. , p. 145 - 152, 2005. | |
dc.identifier | | |
dc.identifier | | |
dc.identifier | http://www.scopus.com/inward/record.url?eid=2-s2.0-31744446377&partnerID=40&md5=c4879cde049e62be0ff9bc106ad3fe89 | |
dc.identifier | http://www.repositorio.unicamp.br/handle/REPOSIP/94025 | |
dc.identifier | http://repositorio.unicamp.br/jspui/handle/REPOSIP/94025 | |
dc.identifier | 2-s2.0-31744446377 | |
dc.identifier.uri | http://repositorioslatinoamericanos.uchile.cl/handle/2250/1241570 | |
dc.description | In this paper we have developed an excellent quality passivation silicon nitride film that requires no surface pre-treatment, is fully compatible to Monolithic Microwave Integrated Circuits (MMICs). The silicon nitride film is deposited (by Electron Cyclotron Resonance (ECR) - Chemical Vapor Deposition (CVD)) directly over GaAs-n substrate and over InGaP/GaAs heterojunction structures, which are used for Heterojunction Bipolar Transistors (HBTs). Optical emission spectrometry (OES) was used for plasma characterization, and low formation of H and NH molecules in the gas phase was detected at pressure of 2 mTorr. These molecules can degrade the III-V semiconductor surfaces due to the preferential loss of As or P and the hydrogen incorporation at substrate. The substrates were cleaned with organic solvents using a Sox-let distillate. The ECR depositions were carried out at a fixed substrate temperature of 20°C, SiH4/N2 flow ratio of l, Ar flow of 5 sccm, pressure of 2 mTorr and microwave (2.45 GHz) and RF (13.56 MHz) powers of 250 W and 4 W, respectively. Metal/nitride/GaAs-n capacitors were fabricated from all the samples considered with 285 mn thick AuGeNi gate and wafer backside electrodes, which were formed by e-beam evaporation, sintered by conventional furnace in forming gas (92%N2 + 8%H2) at 450°C for 3.5 minutes. The gate electrodes were patterned with a mask composed of an array of 200 μm diameter dots. C-V measurements at 1 MHz were performed. The effective charge densities Q0 of 3×1011 cm -2 were calculated directly from the flatband voltage shift V fb. Leakage current densities lower than 1 μA/cm2 (between -2 V to 2 V) are determined through I-V characterization. We have applied this film to our InGaP/GaAs HBT fabrication process with excellent results, such as higher current gain of passivated device in related to unpassivated HBTs. | |
dc.description | PV 2005-08 | |
dc.description | | |
dc.description | 145 | |
dc.description | 152 | |
dc.description | Yoshioka, R.T., Barros Jr., L.E.M.D., Diniz, J.A., Swart, J.W., (1999) Microwave and Optoelectronics Conference, 1999, 1, p. 108. , SBMO/IEEE MTT-S, APS and LEOS - IMOC '99. International | |
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dc.description | Jin, Z., Neumann, S., Prost, W., Tegude, F., (2005) Solid-state Electronics, 49 (3), p. 409 | |
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dc.description | Lee, J.W., MacKenzie, K.D., Johnson, D., Shul, R.J., Pearton, S.J., Abernathy, C.R., Ren, F., (1998) Solid-state Electronics, 42 (6), p. 1015 | |
dc.description | Lee, J.W., MacKenzie, K.D., Johnson, D., Shul, R.J., Pearton, S.J., Abernathy, C.R., Ren, F., (1998) Solid-state Electronics, 42 (6), p. 1021 | |
dc.description | Diniz, J.A., Doi, I., Swart, J.W., (2003) Materials Characterization, 50, p. 135 | |
dc.description | Diniz, J.A., De Barros Jr., L.E.M., Yoshioka, R.T., Lujan, O.S., Danilov, I., Swart, J.W., (1999) Proc. Symp.Compound Semiconductor Surface Passivation and Novel Device Processing - Mat. Res. Soc., 573, p. 137. , San Francisco, CA, U.S.A | |
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dc.language | en | |
dc.publisher | | |
dc.relation | Proceedings - Electrochemical Society | |
dc.rights | fechado | |
dc.source | Scopus | |
dc.title | Ecr-cvd Sinx Passivation In Gaas-based Devices | |
dc.type | Actas de congresos | |