The prediction of the behavior of the induction actuated scanners is a problem that involves the modeling of different physical domains as structural and electromagnetic. The Finite Element Approach is a highly viable alternative to obtain reliable predictions for its behavior over other available methods as the analytic, or circuit equivalent methods. In this work a finite element model for the structural an electromagnetic domains of the induction actuated scanning mirror was presented. To validade these models two experiments were performed, a laser doppler vibrometry of the double-rotor scanner to identify its modes shapes and natural frequencies and a magnetic field mapping of the actuator to obtain the spatial characteristic of the AC and DC magnetic fields generated by the actuator in the device armature region. There is a good agreement between the FEA models and the experimental results.5873 6571Barbaroto, P.R., Ferreira, L.O.S., Doi, I., Micromachined scanner actuated by electromagnetic induction (2002) Optomechatronic Systems III, Proceedings of SPIE, 4092, pp. 691-698. , SPIE - The International Society for Optical Engineering, (Washinghton, USA), NovemberDe Oliveira, L.C.M., Ferreira, L.O.S., Silicon micromachined double-rotor scanner (2003) Proceedings of the IV Optomechatronics Conference, Proceedings of SPIE, 21 (3), pp. 634-642Beiser, L., (1992) Laser Scanning Notebook, , Publishd by SPIE - The International Society for Optical Engineering, P.O.Box 10, Bellingham, Washington, 98227-0010Ji, C.-H., Kim, Y.-K., Electromagnetic micromirror array with single-crystal silicon mirror plate and aluminum spring (2003) Journal of Lightwave Technology, 21, pp. 584-590Asada, N., Takeuchi, M., Vagnov, V., Belov, N., Hout, S.I., Sluchak, I., Silicon micro-optical scanner (2000) Sensors and Actuators A, (83), pp. 284-290Ferreira, L.O.S., Pourlborz, F., Ashar, P., Khan-Malek, C., Torsional scanning mirrors actuated by electromagnetic induction and acoustic waves (1998) ICMP98 - International Conference on Microelectronics and Packaging, pp. 155-162. , XIII SBMICROCho, H.J., Ahn, C.H., Magnetically-driven b i-directional optical microscanner (2003) Journal of Micromechanics and Microengineering, 13, pp. 383-389Hao, Z., Wingfield, B., Whitley, M., Brooks, J., Hammer, J.A., A design methodology for a bulk micromachined two-dimensional electrostatic torsion micromirror (2003) Journal of Microelectromechanical Systems, 12, pp. 692-701. , OctCook, R.D., (1981) Concepts and Applications of Finite Element Analysis, , John Wiley and Sons, New YorkBathe, K.J., (1982) Finite Element Procedures in Engineering Analysis, , Prentice-HallZienkiewicz, O.C., (1977) The Finite Element Method, , McGraw-Hill Company, LondonTimoshenko, S.P., Goodier, J.N., (1970) Theory of Elasticity, , McGraw-Hill, TokyoANSYS 5.0 User's Manual - ProceduresPetersen, K.E., Silicon torsional scanning mirror (1980) IBM J. Res. Develop., 24, pp. 631-637. , SeptemberAnsys 50 User's Manual - Theory ReferenceJin, J., (1993) The Finite Element Method in Electromagnetics, , John Wiley and Sons, IncCingoski, V., (1996) Study on Improved Three-dimensional Electromagnetic Field Computations Utilizing Vector Edge Finite Elements, , PhD thesis, Hiroshima University, JanuaryWebb, J.B., Edge elements and what they can do for you (1993) IEEE Transactions on Magnetics, 30, pp. 1460-1465. , MarchS., B.J., Richardson, M.H., Experimental modal analysis (1999) Proceedings of CSI Reliability Week, , (Orlando, Fl), October