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Silicon Field-Emission Devices Fabricated Using the Hydrogen Implantation-Porous Silicon (HI-PS) Micromachining Technique
(IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2008)
This paper presents a relatively simple method to fabricate field-emitter arrays from silicon substrates. These devices are obtained from silicon micromachining by means of the HI-PS technique-a combination of hydrogen ion ...
Surface morphology and structural modification induced by femtosecond pulses in hydrogenated amorphous silicon films
(Amer Scientific Publishers, 2015-03-01)
This work investigates the modification, resulting from fs-laser irradiation (150 fs, 775 nm and 1 kHz), on the structure and surface morphology of hydrogenated amorphous silicon (a-Si:H) thin films. The sample morphology ...
A silicon micromechanical galvanometric scanner
(Elsevier Science SaLausanneSuíça, 1999)
Anisotropic etching of silicon for a micromachining application using plasmas of SF6/CH4/O-2/Ar and SF6/CF4/O-2/Ar
(Sociedad Mexicana De FisicaCoyoacanMéxico, 2004)
Nanostructuring of metal surfaces by laser ablation
(InTech, 2016)
Irradiation of materials such as iron and silicon with single nanosecond laser pulses produces nanostructures on its surfaces. Nevertheless, the deposition before irradiation of thin films on the silicon?s surfaces can ...
Surface morphology and structural modification induced by femtosecond pulses in hydrogenated amorphous silicon films
(Amer Scientific Publishers, 2015)
Surface morphology and structural modification induced by femtosecond pulses in hydrogenated amorphous silicon films
(Amer Scientific Publishers, 2015)