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Innovative low temperature plasma approach for deposition of alumina films
(Univ Fed Sao Carlos, Dept Engenharia Materials, 2014-11-01)
Alumina films were deposited from a new plasma method using aluminum acetylacetonate (AAA) powder as precursor. The AAA was sputtered in argon and oxygen plasma mixtures. It was investigated the effect of the oxygen ...
Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction.
(Laboratório Nacional de Luz SíncrotronCampinas, 2013-02-26)
Reactive Sputter Magnetron (RSM) is a widely used technique to thin films growing
of compounds both, in research laboratories and in industrial processes. The nature
of the deposited compound will depend then on the ...
Innovative low temperature plasma approach for deposition of alumina films
(ABM, ABC, ABPol, 2014-12-01)
Alumina films were deposited from a new plasma method using aluminum acetylacetonate (AAA) powder as precursor. The AAA was sputtered in argon and oxygen plasma mixtures. It was investigated the effect of the oxygen ...
Hardness and structure characterization of Ti(6)Al(4)V films produced by reactive magnetron sputtering on a conventional austenitic stainless steel
(ELSEVIER SCI LTD, 2008)
Ti(6)Al(4)V thin films were grown by magnetron sputtering on a conventional austenitic stainless steel. Five deposition conditions varying both the deposition chamber pressure and the plasma power were studied. Highly ...
Innovative low temperature plasma approach for deposition of alumina films
(Univ Fed Sao Carlos, Dept Engenharia Materials, 2015)
Role of the reactive sputtering deposition power in the phase control of cobalt oxide films
(A V S Amer Inst Physics, 2018-11-01)
The influence of the reactive magnetron sputtering deposition power on determining the stoichiometry and structure of cobalt oxide polycrystalline films is investigated using experimental and simulated data. Direct current ...
SiOxCyHz-TiO2 Nanocomposite Films Prepared by a Novel PECVD-Sputtering Process
(ABM, ABC, ABPol, 2021-07-05)
Recently, there has been growing interest in the incorporation of particles in plasma deposited thin films to creation of multifunctional surfaces. In this work a new hybrid methodology based on the plasma enhanced chemical ...