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Structural transition of ZnO thin films produced by RF magnetron sputtering at low temperatures
(2013-09-01)
Zinc oxide (ZnO) thin films were prepared using reactive radio-frequency magnetron sputtering of a pure metallic zinc target onto glass substrates. The evolution of the surface morphology and the optical properties of the ...
Structural transition of ZnO thin films produced by RF magnetron sputtering at low temperatures
(2013-09-01)
Zinc oxide (ZnO) thin films were prepared using reactive radio-frequency magnetron sputtering of a pure metallic zinc target onto glass substrates. The evolution of the surface morphology and the optical properties of the ...
UV Phototransistors-Based upon Spray Coated and Sputter Deposited ZnO TFTs
(2020-07-15)
A comparison of Zinc Oxide (ZnO) phototransistors prepared by spray and sputter coating process is presented. The work shows that spray coated layers provide significant advantages in sensor response over ZnO phototransistors ...
CdTe oxide films grown by radio frequency sputtering utilizing argon-nitrous oxide plasma
(American Vacuum Society, 2013-01-16)
Effects of thermal annealing on the semi-insulating properties of radio frequency magnetron sputtering-produced germanate thin films
(Elsevier B.V. Sa, 2012-01-31)
We report the effects of thermal annealing on the semi-insulating properties of germanate thin films produced by a radio frequency magnetron sputtering process. Electrical and physical characterizations are presented. In ...
Effects of thermal annealing on the semi-insulating properties of radio frequency magnetron sputtering-produced germanate thin films
(Elsevier B.V. Sa, 2012-01-31)
We report the effects of thermal annealing on the semi-insulating properties of germanate thin films produced by a radio frequency magnetron sputtering process. Electrical and physical characterizations are presented. In ...
Surface morphology-dependent room-temperature LaFeO3 nanostructure thin films as selective NO2 gas sensor prepared by radio frequency magnetron sputtering
(American Chemical Society - ACSWashington, DC, 2014-07)
In the present work, perovskite LaFeO3 thin films with unique morphology were obtained on silicon substrate using radio frequency magnetron sputtering technique. The effect of thickness and temperature on the morphological ...
Understanding UV sensor performance in ZnO TFTs through the application of multivariate analysis
(Ieee, 2018-01-01)
Zinc oxide (ZnO) thin film transistors are well suited to UV sensing application because they absorb predominantly in the UV region due to the wide bandgap (Eg = 3.37 eV) and possess a large exciton binding energy (60 meV) ...