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Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry
(Elsevier B.V., 2012-10-01)
The effect of magnetic field enhanced plasma immersion ion implantation (PIII) in silicon substrate has been investigated at low and high pulsed bias voltages. The magnetic field in magnetic bottle configuration was generated ...
Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry
(Elsevier B.V., 2012-10-01)
The effect of magnetic field enhanced plasma immersion ion implantation (PIII) in silicon substrate has been investigated at low and high pulsed bias voltages. The magnetic field in magnetic bottle configuration was generated ...
Investigation of Plasma Immersion Ion Implantation Process in Magnetic Mirror Geometry
(Institute of Electrical and Electronics Engineers (IEEE), 2011-11-01)
Plasma immersion ion implantation (PIII) with low external magnetic field has been investigated both numerically and experimentally. The static magnetic field considered is essentially nonuniform and is generated by two ...
Investigation of Plasma Immersion Ion Implantation Process in Magnetic Mirror Geometry
(Institute of Electrical and Electronics Engineers (IEEE), 2011-11-01)
Plasma immersion ion implantation (PIII) with low external magnetic field has been investigated both numerically and experimentally. The static magnetic field considered is essentially nonuniform and is generated by two ...
Investigation of Plasma Immersion Ion Implantation Process in Magnetic Mirror Geometry
(Institute of Electrical and Electronics Engineers (IEEE), 2014)
Numerical simulation of magnetic-field-enhanced plasma immersion ion implantation in cylindrical geometry
(Institute of Electrical and Electronics Engineers (IEEE), 2006-08-01)
Recent studies have demonstrated that the sheath dynamics in plasma immersion ion implantation (PIII) is significantly affected by an external magnetic field. In this paper, a two-dimensional computer simulation of a ...
Numerical simulation of magnetic-field-enhanced plasma immersion ion implantation in cylindrical geometry
(Institute of Electrical and Electronics Engineers (IEEE), 2006-08-01)
Recent studies have demonstrated that the sheath dynamics in plasma immersion ion implantation (PIII) is significantly affected by an external magnetic field. In this paper, a two-dimensional computer simulation of a ...
Numerical simulation of magnetic field enhanced plasma immersion ion implantation
(Elsevier B.V., 2007-08-05)
The behavior of plasma and sheath characteristics under the action of an applied magnetic field is important in many applications including plasma probes and material processing. Plasma immersion ion implantation (PIII) ...
Numerical simulation of magnetic field enhanced plasma immersion ion implantation
(Elsevier B.V., 2007-08-05)
The behavior of plasma and sheath characteristics under the action of an applied magnetic field is important in many applications including plasma probes and material processing. Plasma immersion ion implantation (PIII) ...