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Plasma-polymerized acetylene nanofilms modified by nitrogen ion implantation
(2013-06-15)
Thin films were prepared by plasma enhanced chemical vapour deposition (PECVD) from a mixture of acetylene and argon, and post deposition-treated by plasma immersion ion implantation (PIII). The effect of PIII on the ...
Plasma-polymerized acetylene nanofilms modified by nitrogen ion implantation
(2013-06-15)
Thin films were prepared by plasma enhanced chemical vapour deposition (PECVD) from a mixture of acetylene and argon, and post deposition-treated by plasma immersion ion implantation (PIII). The effect of PIII on the ...
Silicon carbide surface modification by nitrogen plasma expander
(Trans Tech Publications Ltd, 2012-01-01)
Silicon carbide (SiC) has been employed in many different fields such as ballistic armor, thermal coating, high performance mirror substrate, semiconductors devices, among other things. Plasma application over the silicon ...
Silicon carbide surface modification by nitrogen plasma expander
(Trans Tech Publications Ltd, 2012-01-01)
Silicon carbide (SiC) has been employed in many different fields such as ballistic armor, thermal coating, high performance mirror substrate, semiconductors devices, among other things. Plasma application over the silicon ...
A Novel Plasma Technique for Surface Treatment: The Plasma Expander
(Institute of Electrical and Electronics Engineers (IEEE), 2012-02-01)
This paper describes a new plasma treatment method: the plasma expander. In this approach, expanding shock waves are generated in a vacuum chamber by pulsed plasmas. Collisions of fast species in the waves modify the ...
A Novel Plasma Technique for Surface Treatment: The Plasma Expander
(Institute of Electrical and Electronics Engineers (IEEE), 2012-02-01)
This paper describes a new plasma treatment method: the plasma expander. In this approach, expanding shock waves are generated in a vacuum chamber by pulsed plasmas. Collisions of fast species in the waves modify the ...
Effect of the admixture of N2to low pressure, low temperature H2-CH4-CO2microwave plasmas used for large area deposition of nanocrystalline diamond films
(2020-11-04)
In a distributed antenna array reactor, microwave H2-CH4-CO2 plasmas with admixture of N2 used for the low-temperature deposition of nanocrystalline diamond (NCD) films are studied by in situ infrared laser absorption ...
Plasma-polymerized hexamethyldisilazane treated by nitrogen plasma immersion ion implantation technique
(Iop Publishing Ltd, 2009-01-01)
This paper describes the effect of nitrogen Plasma Immersion Ion Implantation (PIII) on chemical structure, refraction index and surface hardness of plasma-polymerized hexamethyldisilazane (PPHMDSN) thin films. Firstly, ...