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HMDSO plasma polymerization and thin film optical properties

Mota, Rogério Pinto; Galvão, Douglas; Durrant, Steven F.; De Moraes, Mário A.Bica; de Oliveira Dantas, Socrates; Cantão, Mauricio (2014)

HMDSO plasma polymerization and thin film optical properties

Universidade Estadual Paulista (Unesp); Universidade Estadual de Campinas (UNICAMP); Universidade Federal de Juiz de Fora (UFJF) (1995-12-01)

Thin films were deposited from hexamethyldisiloxane (HMDSO) in a glow discharge supplied with radiofrequency (rf) power. Actino-metric optical emission spectroscopy was used to follow trends in the plasma concentrations ...

HMDSO plasma polymerization and thin film optical properties

Universidade Estadual Paulista (Unesp); Universidade Estadual de Campinas (UNICAMP); Universidade Federal de Juiz de Fora (UFJF) (1995-12-01)

Thin films were deposited from hexamethyldisiloxane (HMDSO) in a glow discharge supplied with radiofrequency (rf) power. Actino-metric optical emission spectroscopy was used to follow trends in the plasma concentrations ...