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Niobium oxide films deposited by reactive sputtering: Effect of oxygen flow rate
(2019-01-01)
Reactive sputtering is a versatile technique used to form compact films with excellent homogeneity. In addition, it allows easy control over deposition parameters such as gas flow rate that results in changes on composition ...
Structural, optical and electrical properties of DC sputtered indium saving indium tin oxide (ITO) thin films
(Elsevier, 2018)
Amorphous indium tin oxide (ITO) thin films with reduced to 50 mass% indium oxide
content were prepared by direct current (DC) sputtering of ITO target in mixed argonoxygen
atmosphere onto glass substrates preheated at ...
Structural, optical and electrical properties of DC sputtered indium saving indium-tin oxide (ITO) thin films
(Elsevier GmbH, 2018)
Amorphous indium tin oxide (ITO) thin films with reduced to 50 mass% indium oxide
content were prepared by direct current (DC) sputtering of ITO target in mixed argonoxygen atmosphere onto glass substrates preheated at ...
Influence of deposition parameters on the properties of Ag-C films deposited by rf magnetron sputtering
(Universidad Nacional de Ingeniería, 2019)
Deposição e caracterizações óptica e morfológica de filmes finos de TIOX depositados por sputtering R.F.
(Universidade Federal de São CarlosBRUFSCarPrograma de Pós-Graduação em Ciência dos Materiais - PPGCM-So, 2013-02-19)
This work studied ultrathin films of titanium oxide were deposited on two substrates, such as pure Si (100) and glass corning 7059, by using r.f. magnetron sputtering with different oxygen flows and maintaining another ...
High density flux of Co nanoparticles produced by a simple gas aggregation apparatus
(AMER INST PHYSICS, 2010)
Gas aggregation is a well known method used to produce clusters of different materials with good size control, reduced dispersion, and precise stoichiometry. The cost of these systems is relatively high and they are generally ...
Role of oxygen flow rate on the structure and stoichiometry of cobalt oxide films deposited by reactive sputtering
(2022-01-01)
The influence of the oxygen gas supply on the stoichiometry, structure, and orientation texture of polycrystalline cobalt oxide films was investigated in this study. The films were grown by direct current reactive magnetron ...
Plasma deposition of silver nanoparticles on ultrafiltration membranes: antibacterial and antibiofouling properties
(Inst Chemical Engineers, 2015-02)
tA novel and versatile plasma reactor was used to modify polyethersulphone commercial membranes. The equipmentwas applied to: (i) functionalize the membranes with low-temperature plasmas, (ii) deposit a film of ...
Construção de um aparato experimental para monitoramento in situ da deposição de filmes finos de titânio por magnetron sputtering
(Universidade Federal do Rio Grande do NorteBRUFRNPrograma de Pós-Graduação em Ciência e Engenharia de MateriaisProcessamento de Materiais a partir do Pó; Polímeros e Compósitos; Processamento de Materiais a part, 2011-12-09)
The technique of surface coating using magnetron sputtering is one of the most widely used in the surface engineering, for its versatility in obtaining different films as well as in the micro / nanometric thickness control. ...