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Silicon wet etching: hillock formation mechanisms and dynamic scaling properties
(Elsevier, 2013-10-15)
Surface roughening due to anisotropic wet etching of silicon was studied experimentally and modeled using the Monte Carlo method. Simulations were used to determine the consequences of site-dependent detachment probabilities ...
A contribution of vibrationally excited Cl-2 molecules to GaAs reactive ion etching in Cl-2/Ar
(Japan J Applied PhysicsMinato-ku TokyoJapão, 1996)
EVOLUTION OF SURFACE TEXTURES ON N-INP SAMPLES ETCHED PHOTOELECTROCHEMICALLY
(Electrochemical Soc IncPennington, 1995)
Etch and rinse versus self-etching adhesives systems: Tridimensional micromechanical analysis of dentin/adhesive interface
(Elsevier B.V., 2012-06-01)
The purpose of this study was to evaluate stress distribution in the hybrid layer produced by two adhesive systems using three-dimensional finite element analysis (FEA). Four FEA models (M) were developed: Mc, a representation ...
Etch and rinse versus self-etching adhesives systems: Tridimensional micromechanical analysis of dentin/adhesive interface
(Elsevier B.V., 2012-06-01)
The purpose of this study was to evaluate stress distribution in the hybrid layer produced by two adhesive systems using three-dimensional finite element analysis (FEA). Four FEA models (M) were developed: Mc, a representation ...
Formation of pyramidal etch hillocks in a Kossel crystal
(Elsevier Science, 2005-11-10)
Surface roughening due to anisotropic etching was studied experimentally and modeled using the Monte Carlo method for a Kossel crystal. Simulations were used to explore a possible formation mechanism for the appearance ...
Dynamics of hillocks formation during wet etching
(Elsevier Science, 2008-02-19)
Etch hillocks formation was studied experimentally and modeled using the Monte Carlo method. Simulations were used to explore the consequences of site-dependent detachment probabilities on surface morphology for a one- and ...
Hillock sizes after wet etching in silicon
(Elsevier Science, 2009-09)
The formation of two- and three-dimensional hillocks is regularly observed in Si(1 1 1) steps and Si(1 0 0) during wet etching. Frequently the resulting morphology consists of hillocks scattered on a landscape of limited ...
Fission track chemical etching kinetic model
(Pergamon-elsevier Science LtdOxfordInglaterra, 2010)