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Development of a slow-wave MEMS phase shifter on CMOS technology for millimeter wave frequencies
(ELSEVIER SCIENCE BVAMSTERDAM, 2012)
We propose a slow-wave MEMS phase shifter that can be fabricated using the CMOS back-end and an additional maskless post-process etch. The tunable phase shifter concept is formed by a conventional slow-wave transmission ...
Diseño de un proceso integrado de fabricación de sistemas micro-electromecánicos (MEMS) genérico y modular.
(Instituto Nacional de Astrofísica, Óptica y Electrónica, 2016)
Diseño de un proceso integrado de fabricación de sistemas micro-electromecánicos (MEMS) genérico y modular.
(Instituto Nacional de Astrofísica, Óptica y Electrónica, 2016)
Design space exploration and synthesis of a CMOS-MEMS Z-axis accelerometer.
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2010-12-01)
This thesis presents a design space exploration of a CMOS-MEMS z-axis accelerometer and an approach towards the development of a synthesis procedure of this type of accelerometer. In this work, a CMOS-MEMS z-axis accelerometer ...
Design of an analog CMOS interface for resonant microsensors
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2008-05-01)
The aim of this thesis is to design a CMOS analog integrated circuit for conditioning a MEMS sensor frequency signal of up to 100 kHz, with an amplitude up to 1 μVP . The circuit is designed with the CMOS AMS® 0.35 μm ...
Mathematical Model and Design of a CMOS-MEMS Infrared Thermopile-Edición Única
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2015)
Design Space Exploration and Synthesis of a CMOS-MEMS Z-axis Accelerometer -Edición Única
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2015)
Design, fabrication and characterization of a high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2010-05-01)
Design, Fabrication and Characterization of a High-Speed, Bimodal, CMOS-MEMS Resonant Scanner Driven by Temperature-Gradient Actuators
(Instituto Tecnológico y de Estudios Superiores de Monterrey, 2015)