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Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma
(A V S Amer Inst PhysicsMelvilleEUA, 2007)
Silicon Nitride Deposited By Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition For Micromachining Applications
(SPIE, Bellingham, WA, United States, 1998)
Magnetic domain states in nano-sized Co nuclei electrodeposited onto monocrystalline silicon
(2004-11-01)
In the present work, nano-sized magnetic nuclei of Co have been electrodeposited onto p-Si (111). The deposition follows a mechanism of progressive nucleation and growth controlled by diffusion. MFM studies showed that the ...
Magnetic domain states in nano-sized Co nuclei electrodeposited onto monocrystalline silicon
(2004-11-01)
In the present work, nano-sized magnetic nuclei of Co have been electrodeposited onto p-Si (111). The deposition follows a mechanism of progressive nucleation and growth controlled by diffusion. MFM studies showed that the ...
Influence of krypton atoms on the structure of hydrogenated amorphous carbon deposited by plasma enhanced chemical vapor deposition
(Amer Inst PhysicsMelvilleEUA, 2010)