Artículos de revistas
Glass Difractive Optical Elements (DOEs) with complex modulation DLC thin film coated
Fecha
2008Registro en:
Materials Research, v.11, n.3, p.341-345, 2008
1516-1439
10.1590/S1516-14392008000300018
Autor
Medeiros, Marina Sparvoli de
Mansano, Ronaldo Domingues
Institución
Resumen
We developed a complex (amplitude and phase) modulation Diffractive Optical Element (DOE) with four phase levels, which is based in a glass substrate coated with DLC (Diamond Like Carbon) thin film as the amplitude modulator. The DLC film was deposited by magnetron reactive sputtering with a graphite target and methane gas in an optical glass surface. The glass and DLC film roughness were measured using non destructive methods, such as a high step meter, Atomic Force Microscopy and Diffuse Reflectance. Other properties, such as refractive index of both materials were measured. The DOEs were tested using 632.8 nm HeNe laser.