Actas de congresos
The Use Of Dbd Plasmas For Treatment Of Pdms Surfaces And Adhesion Improvement
Registro en:
978-1-5090-2788-0
2016 31st Symposium On Microelectronics Technology And Devices (sbmicro). Ieee, p. , 2016.
WOS:000392469000046
10.1109/SBMicro.2016.7731360
Autor
do Nascimento
Fellype; Moshkalev
Stanislav; Machida
Munemasa
Institución
Resumen
Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq) In this work we used an atmospheric pressure dielectric barrier discharge plasma to perform treatments of poly(dimethylsiloxane) (PDMS) surfaces in order to improve the adhesion between the samples. The results show that different conditions of plasma treatment can lead to a better adhesion between the PDMS surfaces. If the power delivered to the plasma is increased, the adhesion is better, but the best results are obtained if the vibrational temperature of the nitrogen molecules in the plasma is increased. CAPES CNPq Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES) Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq) 31st Symposium on Microelectronics Technology and Devices (SBMicro) AUG 29-SEP 03, 2016 Belo Horizonte, BRAZIL