Article
Structural studies of ZnS thin films grown on GaAs by RF magnetron sputtering
Autor
López Gayou, Valentín
Institución
Resumen
X-ray diffraction (XRD) studies of ZnS thin films grown on GaAs (001) substrates at different temperatures
by rf magnetron sputtering have been carried out using CuKa radiation. XRD analysis reveals that
deposited films below 335 C, assumed the zinc blend structure. Samples annealed at above 335 C
showed mixed phases of the zinc blend and wurzite structures. Information about crystallite size is
obtained from (001), (111) and (104) diffraction peaks. The average crystallite size of the film was
determined to be w 32 nm using the Scherrer formula.