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Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry
(Elsevier B.V., 2012-10-01)
The effect of magnetic field enhanced plasma immersion ion implantation (PIII) in silicon substrate has been investigated at low and high pulsed bias voltages. The magnetic field in magnetic bottle configuration was generated ...
Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry
(Elsevier B.V., 2012-10-01)
The effect of magnetic field enhanced plasma immersion ion implantation (PIII) in silicon substrate has been investigated at low and high pulsed bias voltages. The magnetic field in magnetic bottle configuration was generated ...
Plasma immersion ion implantation: Influence on the rotating bending fatigue strength of AA 7050-T7451 aluminum alloy
(2017-10-01)
Failures in structural components due to cyclic loading are associated with the surface damage. The aircraft industry has been searched into the alternative coatings that enhance performance by reducing the environmental ...
Numerical simulation of magnetic field enhanced plasma immersion ion implantation
(Elsevier B.V., 2007-08-05)
The behavior of plasma and sheath characteristics under the action of an applied magnetic field is important in many applications including plasma probes and material processing. Plasma immersion ion implantation (PIII) ...
Numerical simulation of magnetic field enhanced plasma immersion ion implantation
(Elsevier B.V., 2007-08-05)
The behavior of plasma and sheath characteristics under the action of an applied magnetic field is important in many applications including plasma probes and material processing. Plasma immersion ion implantation (PIII) ...
Improvements of plasma immersion ion implantation (PIII) and deposition (PIII&D) processing for materials surface modification
(2013-08-25)
Plasma immersion ion implantation (PIII) process is a three dimensional surface modification method that is quite mature and well known to the surface engineering community nowadays, especially to those working in the field ...
Improvements of plasma immersion ion implantation (PIII) and deposition (PIII&D) processing for materials surface modification
(2013-08-25)
Plasma immersion ion implantation (PIII) process is a three dimensional surface modification method that is quite mature and well known to the surface engineering community nowadays, especially to those working in the field ...