Integration of MOSFET/MIM structures using a CMOS-based technology for pH detection applications with high-sensitivity

dc.creatorJoel Molina Reyes
dc.creatorALFONSO TORRES JACOME
dc.creatorGUILLERMO ESPINOSA FLORES VERDAD
dc.creatorMARIA TERESA SANZ PASCUAL
dc.creatorErick Guerrero Rodríguez
dc.creatorBERNI MANOLO PEREZ RAMOS
dc.date2012
dc.date.accessioned2023-07-25T16:24:53Z
dc.date.available2023-07-25T16:24:53Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/2068
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7807250
dc.descriptionIn this work, we show that by using Metal-Insulator-Metal (MIM) structures integrated in series to the gateof submicron Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) devices, highly-sensitive and ultra-lowpower consumption pH sensors can be obtained. One MIM capacitor enables external polarization of the MOSFETdevice while a second MIM capacitor is connected to a sensing plate whose surface is whether a thick polyimidelayer or the last metallization level. The electrochemical response of these surfaces to pH buffer solutions resemblesthat of Ion-Sensitive Field-Effect Transistor (ISFET) devices whose pH sensitivity is dependent on the type of surfacematerial being exposed.
dc.formatapplication/pdf
dc.languageeng
dc.publisherProcedia Chemistry
dc.relationcitation:Molina, J., et al., (2012), Integration of MOSFET/MIM structures using a CMOS-based technology for pH detection applications with high-sensitivity, Procedia Chemistry, Vol. 6:110 - 116.
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/Inspec/ISFET
dc.subjectinfo:eu-repo/classification/Inspec/MOSFET
dc.subjectinfo:eu-repo/classification/Inspec/MIM capacitor
dc.subjectinfo:eu-repo/classification/Inspec/Reference electrode
dc.subjectinfo:eu-repo/classification/Inspec/pH detection
dc.subjectinfo:eu-repo/classification/Inspec/Chemical sensor
dc.subjectinfo:eu-repo/classification/Inspec/CMOS processing.
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleIntegration of MOSFET/MIM structures using a CMOS-based technology for pH detection applications with high-sensitivity
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


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