Noise spectra of Six Gey Bz:H thermo-sensing films for micro-bolometers

dc.creatorANDREY KOSAREV
dc.creatorISMAEL COSME BOLAÑOS
dc.creatorALFONSO TORRES JACOME
dc.date2009
dc.date.accessioned2023-07-25T16:23:17Z
dc.date.available2023-07-25T16:23:17Z
dc.identifierhttp://inaoe.repositorioinstitucional.mx/jspui/handle/1009/1248
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/7806445
dc.descriptionNoise spectra in plasma deposited SixGeyBz:H thermo-sensing films for micro-bolometers have been studied. The samples were characterized by SIMS (composition) and conductivity (room temperature conductivity, activation energy) measurements. The noise spectra were measured in the temperature range from T= 300 K to T=400 K and in the frequency range from f=2 Hz to f=2×104 Hz. The noise spectra SI(f) for the samples Si0.11Ge0.88:H and Si0.04Ge0.71B0.23 can be described by SI(f) ˜ f – β with β = 1 and β = 0.4, respectively. For the sample Si0.06Ge0.67B0.26 two slopes were observed: in low frequency region f≤ 103 Hz β1= 0.7 and at higher frequencies f>103 Hz β2= 0.13. Increasing temperature resulted in an increase of noise magnitude and a change of β values. The latter depended on film composition. The correlation observed between noise and conductivity activation energies suggests that noise is due to bulk rather than interface processes. Noise spectrum of the thermo-sensing film Si0.11Ge0.88:H was compared with that for micro-bolometer structure with the same thermo-sensing film. The micro-bolometer structure showed higher noise value in entire frequency range that assumed additional processes inducing noise.
dc.formatapplication/pdf
dc.languageeng
dc.publisherMaterials Research Society
dc.relationcitation:Kosarev, A., et al., (2009). Noise spectra of Six Gey Bz:H films for micro-bolometers, Mater. Res. Soc. Symp. Proc. Vol. 1153 (A19-05): 1-6
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.subjectinfo:eu-repo/classification/cti/1
dc.subjectinfo:eu-repo/classification/cti/22
dc.subjectinfo:eu-repo/classification/cti/2203
dc.subjectinfo:eu-repo/classification/cti/2203
dc.titleNoise spectra of Six Gey Bz:H thermo-sensing films for micro-bolometers
dc.typeinfo:eu-repo/semantics/article
dc.typeinfo:eu-repo/semantics/acceptedVersion
dc.audiencestudents
dc.audienceresearchers
dc.audiencegeneralPublic


Este ítem pertenece a la siguiente institución