info:eu-repo/semantics/article
Comparison of three un-cooled micro-bolometers configurations based on amorphous silicon–germanium thin films deposited by plasma
Autor
MARIO MORENO MORENO
ANDREY KOSAREV
ALFONSO TORRES JACOME
ROBERO CARLOS AMBROSIO LAZARO
Resumen
We present a comparative study of three configurations of un-cooled micro-bolometers based on amorphous silicon–germanium thin films deposited by plasma at low temperature and compatible with the IC technology. The temperature dependence of conductivity δ(T), current–voltage characteristics I(U) and current noise spectral density (NSD) have been measured in order to characterize and compare the performance characteristics, such as responsivity and detectivity in three configurations of micro-bolometers: (a) planar structure with a silicon–germanium intrinsic (a-SixGey:H) thermo-sensing film; (b) planar structure with a silicon–germanium–boron alloy (a-Six-GeyBz:H) thermo-sensing film and (c) sandwich structure with an intrinsic (a-SixGey:H) thermo-sensing film. The samples studied demonstrated different cell resistance Rc = 105–108 X and responsivities R1 = 101–10-3 A/W, while the values of detectivity D* were quite similar D* = (4–7) X 109 cm Hz1/2 W-1.
Materias
Ítems relacionados
Mostrando ítems relacionados por Título, autor o materia.
-
Compendio de innovaciones socioambientales en la frontera sur de México
Adriana Quiroga -
Caminar el cafetal: perspectivas socioambientales del café y su gente
Eduardo Bello Baltazar; Lorena Soto_Pinto; Graciela Huerta_Palacios; Jaime Gomez -
Material de empaque para biofiltración con base en poliuretano modificado con almidón, metodos para la manufactura del mismo y sistema de biofiltración
OLGA BRIGIDA GUTIERREZ ACOSTA; VLADIMIR ALONSO ESCOBAR BARRIOS; SONIA LORENA ARRIAGA GARCIA