info:eu-repo/semantics/article
Annealing Effect on the Structural and Optical properties of SiOx films deposited by HFCVD
Autor
Jorge Alberto Luna López
ALFREDO BENITEZ LARA
GODOFREDO GARCIA SALGADO
JOSE ALVARO DAVID HERNANDEZ DE LA LUZ
Alfredo Morales Sánchez
SERGIO ALFONSO PEREZ GARCIA