info:eu-repo/semantics/article
Growth, structure and optical characterization of high quality ZnO thin films obtained by spray pyrolysis
Autor
FRANCISCO PARAGUAY DELGADO
MARIO MIKI YOSHIDA
Resumen
Zinc oxide thin films were prepared by spray pyrolytic decomposition of zinc acetate onto a glass substrate. Auger spectroscopy showed that the film stoichiometry is close to the ZnO phase with a little excess of oxygen. X-ray diffraction spectra show that the structure belongs to the hexagonal wurtzite crystal type, with a mean crystallite size in the range 20-33 nm. Under optimized deposition conditions films are caxis oriented, having a full width at half-maximum (FWHM) value of the (002) X-ray diffraction line of 0.238. Microstructure was analysed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and high resolution electron microscopy (HREM). In regard to the crystal growth, a critical temperature was found to be around 600 K. Above this critical temperature the film is c-axis oriented and almost all grains became round shaped. Optical constants, n and k, were determined using only transmittance data and a direct band gap of 3.28 eV was deduced.
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