"The microelectro mechanical systems (MEMS) are an important contribution to the innovation of the technology that we use everyday, they are the core of mobile communication systems. The characterization of MEMS is needed to develop a better performance of the device, this is key but challenging because stringent conditions have to be fulfilled. The objective of this research is to implement a homodyne Michelson interferometer that contributes to characterize the surface acoustic waves in MEMS and phononic devices. The main characteristic of the homodyne interferometer is that the waves that interfere have the same optical frequency. The implementation of a homodyne Michelson interferometer with two option of stabilization, using a feedback controller and a Quadrature detection approach has been explored. The mechanical displacement of two devices were characterized, also the quality factor of one of them was obtained. It was achieved to implement a homodyne interferometer for the measurement of out of plane vibration. The functioning of the interferometer was proved from 100 Hz to 3 MHz. The amplitude limit was found to be 0.14 pm/√HZ . The frequency limit of this homodyne has an electronical limit of 1.2 GHz."