Articulo
Formation of an extended CoSi<SUB>2</SUB> thin nanohexagons array coherently buried in silicon single crystal
Autor
Kellermann, Guinther
Montoro, Luciano A.
Giovanetti, Lisandro José
Santos Claro, Paula Cecilia dos
Zhang, Liang
Ramirez, Antonio J.
Requejo, Félix Gregorio
Craievich, Aldo F.
Institución
Resumen
A Co-doped silica film was deposited on the surface of a Si(100) wafer and isothermally annealed at 750 °C to form spherical Co nanoparticles embedded in the silica film and a few atomic layer thick CoSi 2 nanoplatelets within the wafer. The structure, morphology, and spatial orientation of the nanoplatelets were characterized. The experimental results indicate that the nanoplatelets exhibit hexagonal shape and a uniform thickness. The CoSi 2 nanostructures lattice is coherent with the Si lattice, and each of them is parallel to one of the four planes belonging to the {111} crystallographic form of the host lattice. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas