comunicación de congreso
Enabling Solutions for 28nm CMOS Advanced Junction Formation
Date
2010Author
Li, C.I.
Kuo, P.
Lai, H.H.
Ma, K.
Liu, R.
Wu, H.H.
Chan, M.
Yang, C.L.
Wu, J.Y.
Arévalo, Edward
Guo, B.N.
Colombeau, B.
Thirumal, T.
Toh, T.
Shim, K.H.
Sun, H.L.
Wu, T.
Lu, S.