Foundry Polymer-Based Inverted-Rib Waveguides

Actas de congresos

Fecha

2019-01-11

Registro en:

2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018.

http://hdl.handle.net/11449/187392

10.1109/SBFoton-IOPC.2018.8610902

2-s2.0-85061980925

https://repositorioslatinoamericanos.uchile.cl/handle/2250/5368430

Autor

Centro de Tecnologia da Informação (CTI) Renato Archer

Universidade Estadual Paulista (Unesp)

CEITEC S.A Semiconductors

Institución

Universidade Estadual Paulista (Brasil)

Resumen

Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.

Materias

optical device fabrication

optical polymers

optical resonators

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