Temperature control of diffusion/CVD furnaces using robust multivariable loop-shaping techniques

dc.creatorJOSE JOB FLORES GODOY
dc.date1999
dc.date.accessioned2022-10-12T20:22:29Z
dc.date.available2022-10-12T20:22:29Z
dc.identifierhttp://ri.ibero.mx/handle/ibero/1745
dc.identifier.urihttps://repositorioslatinoamericanos.uchile.cl/handle/2250/4131516
dc.formatapplication/pdf
dc.languageeng
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightshttp://creativecommons.org/licenses/by-nc-nd/4.0
dc.sourceProceedings of the IEEE Conference on Decision and Control, Vol. 4, 1999
dc.subjectinfo:eu-repo/classification/cti/1
dc.titleTemperature control of diffusion/CVD furnaces using robust multivariable loop-shaping techniques
dc.typeinfo:eu-repo/semantics/conferencePaper


Este ítem pertenece a la siguiente institución