Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films

Trabalho apresentado em evento

Date

2002-01-01

Registration in:

Ferroelectrics, v. 271, p. 33-38.

0015-0193

1563-5112

http://hdl.handle.net/11449/66761

10.1080/00150190211491

2-s2.0-0141943464

http://repositorioslatinoamericanos.uchile.cl/handle/2250/3916485

Author

Universidade Estadual Paulista (Unesp)

Swiss Federal Institute of Technology

Institutions

Universidade Paulista Júlio de Mesquita Filho (Brasil)

Abstract

Polymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow. © 2002 Taylor & Francis.