Trabalho apresentado em evento
Influence of oxygen flow on crystallization and morphology of LiNbO 3 thin films
Ferroelectrics, v. 271, p. 33-38.
Universidade Estadual Paulista (Unesp)
Swiss Federal Institute of Technology
Polymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow. © 2002 Taylor & Francis.