dc.contributor | Universidade Estadual Paulista (Unesp) | |
dc.contributor | Univ Nacl Autonoma Mexico | |
dc.contributor | Univ Calif Berkeley | |
dc.date.accessioned | 2014-05-20T15:23:15Z | |
dc.date.accessioned | 2022-10-05T16:21:05Z | |
dc.date.available | 2014-05-20T15:23:15Z | |
dc.date.available | 2022-10-05T16:21:05Z | |
dc.date.created | 2014-05-20T15:23:15Z | |
dc.date.issued | 2007-05-03 | |
dc.identifier | Materials Research Bulletin. Oxford: Pergamon-Elsevier B.V., v. 42, n. 5, p. 975-981, 2007. | |
dc.identifier | 0025-5408 | |
dc.identifier | http://hdl.handle.net/11449/34076 | |
dc.identifier | 10.1016/j.materresbull.2006.08.006 | |
dc.identifier | WOS:000245842600024 | |
dc.identifier.uri | http://repositorioslatinoamericanos.uchile.cl/handle/2250/3906281 | |
dc.description.abstract | Bismuth titanate (Bi4Ti3O12, BIT) films were evaluated for use as lead-free piezoelectric thin films in micro-electromechanical systems. The films were grown by the polymeric precursor method on LaNiO3/SiO2/Si (1 0 0) (LNO), RuO2/SiO2/Si (1 0 0) (RuO2) and Pt/Ti/SiO2/Si (1 0 0) (Pt) bottom electrodes in a microwave furnace at 700 degrees C for 10 min. The domain structure was investigated by piezoresponse force microscopy (PFM). Although the converse piezoelectric coefficient, d(33), regardless of bottom electrode is around (similar to 40 pm/V), those over RuO2 and LNO exhibit better ferroelectric properties, higher remanent polarization (15 and 10 mu C/cm(2)), lower drive voltages (2.6 and 1.3 V) and are fatigue-free. The experimental results demonstrated that the combination of the polymeric precursor method assisted with a microwave furnace is a promising technique to obtain films with good qualities for applications in ferroelectric and piezoelectric devices. (c) 2006 Elsevier Ltd. All rights reserved. | |
dc.language | eng | |
dc.publisher | Elsevier B.V. | |
dc.relation | Materials Research Bulletin | |
dc.relation | 2.873 | |
dc.relation | 0,746 | |
dc.rights | Acesso restrito | |
dc.source | Web of Science | |
dc.subject | thin films | |
dc.subject | chemical synthesis | |
dc.subject | ferroelectricity | |
dc.title | Ferroelectric and piezoelectric properties of bismuth titanate thin films grown on different bottom electrodes by soft chemical solution and microwave annealing | |
dc.type | Artigo | |