A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results.Fil: Lonac, Julio Andrés. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Consejo Nacional de Investigaciones Científicas y Técnicas. ArgentinaFil: Merletti, Gustavo Ariel. Universidad Nacional de San Martín. Escuela de Ciencia y Tecnología; Argentina. Consejo Nacional de Investigaciones Científicas y Técnicas; Argentina