Actas de congresos
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method
Fecha
2014-05-12Registro en:
2014 IEEE International Instrumentation and Measurement Technology Conference (i2mtc) Proceedings. New York: IEEE, p. 1533-1536, 2014.
1446-7598
10.1109/I2MTC.2014.6861002
WOS:000346477200303
6405339510883203
2883440351895167
0000-0003-4201-5617
0000-0001-6320-755X
Autor
Universidade Estadual Paulista (Unesp)
Universidade de São Paulo (USP)
Institución
Resumen
Piezoelectric flextensional actuator (PFA) devices consist in a technology in development, with increasing number of applications in precision mechanics such as nanotechnology equipments, electronic microscopy instruments, cell manipulation systems, microsurgery tools, and lens positioner for laser interferometer to name a few. In turn, optical interferometry is an adequate technique to measure nano/micro displacements and to characterize these PFAs. An efficient method for optical phase detection is the n-commuted Pernick method (n-CPM), where only a limited number of frequencies in the magnitude spectrum of the photo detected signal are used, without the need to know the phase spectrum. The n-CPM has the advantages of being passive homodyne, direct, self-consistent, and is immune to fading. The dynamic range for optical phase measurements is from 0.2 rad to 100 pi rad. In this work, by using the n-CPM, a new PFA prototype designed by topology-optimization method is tested in terms of displacement linearity (relative to applied voltage) and frequency response.