Artículos de revistas
Determination of thickness and optical constants of amorphous silicon films from transmittance data
Registro en:
Applied Physics Letters. Amer Inst Physics, v. 77, n. 14, n. 2133, n. 2135, 2000.
0003-6951
WOS:000089524900018
10.1063/1.1314299
Autor
Mulato, M
Chambouleyron, I
Birgin, EG
Martinez, JM
Institución
Resumen
This work presents the application of a recently developed numerical method to determine the thickness and the optical constants of thin films using experimental transmittance data only. This method may be applied to films not displaying a fringe pattern and is shown to work for a-Si:H (hydrogenated amorphous silicon) layers as thin as 100 nm. The performance and limitations of the method are discussed on the basis of experiments performed on a series of six a-Si:H samples grown under identical conditions, but with thickness varying from 98 nm to 1.2 mu m. (C) 2000 American Institute of Physics. [S0003-6951(00)02540-7]. 77 14 2133 2135