Actas de congresos
Laser Interference Structuring Of A-gen For The Production Of Optical Diffraction Gratings
Registro en:
Materials Research Society Symposium - Proceedings. , v. 762, n. , p. 717 - 722, 2003.
2729172
2-s2.0-1642520638
Autor
Mulato M.
Zanatta A.R.
Toet D.
Chambouleyron I.E.
Institución
Resumen
In this work, we study the pulsed laser crystallization of hydrogen-free amorphous germanium-nitrogen alloys (a-GeN). We discuss the role of nitrogen during phase transitions and the possible application of the resulting structure as an optical diffraction grating. The crystallized region results of pure microcrystalline germanium (μc-Ge). An indication that Ge-N bonds have broken and nitrogen outdiffused of the film is obtained from infrared spectroscopy and confirmed by Raman spectra. A pattern of alternating a-GeN and μc-Ge lines with a period of about 4 μm acts as an optical diffraction grating due to the difference in optical properties between the two materials, and the three dimensional surface profile, caused by N2 effusion, that is formed on the sample. 762
717 722 Lin, C.W., Tseng, C.H., Chang, T.K., Lin, C.W., Wang, W.T., Cheng, H.C., (2002) IEEE Electron Device Letters, 23, p. 133 Hatanaka, Y., Niraula, M., Nakamura, A., Aoki, T., (2001) Applied Surface Science, 175, p. 462 Toet, D., Smith, P.M., Sigmon, T.W., Thompson, M.O., (2000) Applied Physics Letters, 77, p. 307 Lu, J.P., Mei, P., Fulks, R.T., Rahn, J., Ho, J., Wang, Y., Boyce, J.B., Street, R.A., (2000) Journal of Vaccum Science and Technology A- Vacuum Surfaces and Films, 18, p. 1823 Sposili, R.S., Im, J.S., (1998) Applied Physics A- Materials Science and Processing, 67, p. 273 Im, J.S., Sposili, R.S., Crowder, M.A., (1997) Applied Physics Letters, 70, p. 3434 Sposili, R.S., Im, J.S., (1996) Applied Physics Letters, 69, p. 2864 Sameshima, T., (1996) Applied Surface Science, 96 (8), p. 352 Gosain, D.P., Machida, A., Usui, S., Arai, M., (2001) Polycrystalline Semiconductors IV Materials, Technologies and Large Area Electronics, 80-81, p. 169 Gosain, D.P., Noguchi, T., Usui, S., (2000) Japanese Journal of Applied Physics Part 2 - Letters, 39, pp. L179 Carey, P.G., Smith, P.M., Theiss, S.D., Wickboldt, P., (1999) Journal of Vacuum Science and Technology A - Vacuum Surfaces and Films, 17, p. 1946 Mulato, M., Toet, D., Aichmayr, G., Santos, P.V., Chambouleyron, I., (1997) Appl. Phys. Lett., 70, p. 3570 Aichmayr, G., Toet, D., Mulato, M., Santos, P.V., Spangenberg, A., Christiansen, S., Albrecht, M., Strunk, H.P., (1998) Phys. Stat. Sol. (a), 166, p. 659 Aichmayr, G., Toet, D., Mulato, M., Santos, P.V., Spangenberg, A., Bergman, R.B., (1998) J. of Non-cryst. Solids, 227-230, p. 921 Mulato, M., Toet, D., Aichmayr, G., Spangenberg, A., Santos, P.V., Chambouleyron, I., (1998) J. of Non-cryst. Solids, 227-230, p. 930 Aichmayr, G., Toet, D., Mulato, M., Santos, P.V., Spangenberg, A., Christiansen, S., Albrecht, M., (1999) J. Appl. Phys., 85, p. 4010 Gupta, V.V., Song, H.J., Im, J.S., (1997) Applied Physics Letters, 71, p. 99 Heintze, M., Santos, P.V., Nebel, C.E., Stutzmann, M., (1994) Appl Phys. Lett., 64, p. 3148 Mulato, M., Toet, D., Aichmayr, G., Santos, P.V., Chambouleyron, I., (1997) J. Appl. Phys., 82, p. 5159 Zanatta, A.R., Chambouleyron, I., (1993) Phys. Rev. B, 48, p. 4560 Swanepoel, R., (1983) J. Phys. E: Sci Instrum, 16, p. 1214 Marques, F.C., Chambouleyron, I., Evangelisti, F., (1989) J. of Non-cryst. Solids, 114, p. 561 Guanchua, C., Fangqing, Z., (1990) This Solid Films, 185, p. 231 Marques, F.C., Lacerda, R.G., Lima Jr., M.M., Vilcarromero, J., (1995) Phys. Stat. Sol(b), 192, p. 549 Zanatta, A.R., Chambouleyron, I., Santos, P.V., (1996) J. Appl. Phys., 79, p. 1