Artículos de revistas
Hard Hydrogenated Carbon Films With Low Stress
Registro en:
Applied Physics Letters. , v. 73, n. 5, p. 617 - 619, 1998.
36951
10.1063/1.121874
2-s2.0-0000696411
Autor
Lacerda R.G.
Marques F.C.
Institución
Resumen
Analysis of hard a-C:H films with low stress prepared by methane plasma decomposition is reported. Films with hardness as high as 14 GPa and stress as low as 0.5 GPa were obtained. These films have a high Raman Id/Ig ratio (∼1.0), and small Tauc's band gap (∼0.4 eV). This letter also supplies strong evidence that the subimplantation deposition model, used to explain the formation of ta-C and ta-C:H films, is also valid for a-C:H films deposited by methane plasma decomposition. It is proposed that the rigidity of the films is basically provided by a matrix of dispersed cross-linked sp2 sites, in addition to the contribution of the sp3 sites. © 1998 American Institute of Physics. 73 5 617 619 Franceschini, D.F., Achete, C.A., Freire Jr., F.L., (1992) Appl. Phys. Lett., 60, p. 3229 Chhowalla, M., Yin, Y., Amaratunga, G.A.J., McKenzie, D.R., Frauenheim, T., (1996) Appl. Phys. Lett., 69, p. 2344 Hoffman, R.W., (1996) Physics of Thin Films, 3. , in edited by G. Hass and R. E. Thun Academic, New York Jiang, X., Reichelt, K., Stritzker, B., (1989) J. Appl. Phys., 66, p. 5805 Lifshitz, Y., Kasi, S.R., Rabalais, J.W., (1989) Phys. Rev. Lett., 68, p. 620 Lifshitz, Y., Kasi, S.R., Rabalais, J.W., (1990) Phys. Rev. B, 41, p. 10468 McKenzie, D.R., Muller, D., Pailthorpe, B.A., (1991) Phys. Rev. Lett., 67, p. 773 Fallon, P.J., Veerasamy, V.S., Davis, C.A., Robertson, J., Amaratunga, G.A.J., Milne, W.I., Koskinen, J., (1993) Phys. Rev. B, 48, p. 4777 Weiler, M., Sattel, S., Jung, K., Ehrhardt, H., Veerasamy, V.S., Robertson, J., (1994) Appl. Phys. Lett., 64, p. 2797 Robertson, J., (1993) Diamond Relat. Mater., 2, p. 984 Davis, C.A., (1993) Thin Solid Films, 226, p. 30 Kohler, K., Coburn, J.W., Horne, D.E., Kay, E., (1985) J. Appl. Phys., 57, p. 59 Chapman, B., (1980) Glow Discharge Process, , Wiley, New York Moller, W., (1993) Appl. Phys. A: Solids Surf., 56, p. 527 Kleber, R., Weiler, M., Kruger, A., Sattel, S., Kunz, G., Jung, K., Ehrbardt, H., (1993) Diamond Relat. Mater., 2, p. 246 Robertson, J., (1992) Phys. Rev. Lett., 68, p. 220 Tamor, M.A., Vassell, W.C., Carduner, K.R., (1991) Appl. Phys. Lett., 58, p. 592 Walters, J.K., Honeybone, P.J.R., Huxley, D.W., Newport, R., Howells, W.S., (1994) Phys. Rev. B, 50, p. 831 Stephan, U., Frauenheim, T., Blaudeck, P., Jungnickel, G., (1994) Phys. Rev. B, 49, p. 1489 Robertson, J., (1996) J. Non-Cryst. Solids, 198-200, p. 614 Robertson, J., (1997) Diamond Relat. Mater., 6, p. 212 Schwan, J., Ulrich, S., Batori, V., Ehrhardt, H., Silva, S.R.P., (1996) J. Appl. Phys., 80, p. 440 Tamor, M., Vassel, W., (1994) J. Appl. Phys., 76, p. 446 Prawer, S., Nugent, K.W., Lifshitz, Y., Lampert, G.D., Grossman, E., Kulik, J., Kalish, R., (1996) Diamond Relat. Mater., 5, p. 433 Robertson, J., (1994) Pure Appl. Chem., 66, p. 1789 Robertson, J., (1992) Surf. Coat. Technol., 50, p. 185 Kelires, P.C., (1994) Phys. Rev. Lett., 73, p. 2460 Amaratunga, G.A.J., Chhowalla, M., Kiely, C.J., Alexandrou, I., Devenish, R.M., (1996) Nature (London), 383, p. 321